kSA BandiT
Wafer and Thin-Film Temperature Monitor – Go Where Pyrometers Can’t!
Key features
- Semiconductor Band Edge Temperature
- Blackbody Temperature (based on emission profile)
- Broadband Pyrometry Temperature W/User-Programmable Wavelength Range
- Film Thickness
- Film Growth Rate
- Surface Roughness
The
kSA BandiT is a non-contact, non-invasive, real-time, absolute wafer and thin-film temperature monitoring tool used during thin-film deposition and thermal processing. Using the temperature-dependent optical absorption edge inherent in semiconductor materials, kSA BandiT provides semiconductor temperature monitoring in ranges that pyrometers cannot measure: substrates transparent in the infrared (including GaN, SiC, ZnO, AlN, Ga2O3 and SrTiO3), as well as low temperature monitoring, e.g. low temperature GaAs, InP, and Si deposition. This includes room temperature wafer measurements. Furthermore, kSA BandiT is immune to changing viewport transmission, stray light, and signal contribution from substrate or source heaters, all sources of measurement error for pyrometers.
Combined with its patented blackbody emission monitor, kSA
BandiT has the ability to monitor the full range of temperatures for most substrate materials, including low band-gap substrates and metal films. Finally, because kSA BandiT uses a solid-state spectrometer, real-time film thickness and surface roughness can also be measured.
Interesting Application note 1: here.
Interesting Application note 2: here.
Watch an interesting video: Inside the development of the industry leading thin film thermometry system.
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