Key features
- Rotation Monitoring and Triggering (RMAT)
- Laser Trigger Module (LTM)
- kSA Pulse Control
- kSA Insight Plus
- kSA Communications Interface
- Hg-Ar Calibration Lamps
Product information
Product information
kSA Accessories
kSA Accessories make your measurement methods easier and more dependable.
From triggering to calibration lamps, there are options to make your metrology system work better for you. Explore the benefits of triggering options based on rotation position, rotation stage or pulse as well as other various accessories.
Product information
Product information
- RMAT Data Sheet
- Pulse Control Specifications
- kSA Insight Plus (real-time view into deposition)
- Power Supplies for Heated Viewports
- kSA Communications Interface
- kSA AppCmd Client