kSA ACE

The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.

Key features

  • Real-Time Flux Density Measurement
  • Real-Time Growth Rate Measurement
  • Real-Time Composition Control
  • Processes - Evaproation, Molecular Beam Epitaxy, Sputtering
  • Pulsed Laser Deposition, Plasma Etch Processes
The kSA ACE system uses conventional hollow cathode lamps (HCLs) to generate the atomic emission for the elements of interest. A high-sensitivity, UV-optimised solid-state spectrometer is utilised to monitor the absorption, along with a second spectrometer to monitor signal drift from the HCLs. Since the technique is inherently material-specific, the signal does not respond to other species or radiation in the chamber. kSA ACE can measure each material of interest independently with high accuracy, providing precise material-specific flux control in multi-source evaporation or co-sputtering processes. With its high sensitivity and long-term repeatability under continuous operation, kSA ACE has applications in the fabrication of III-V and II-VI compounds, semiconductor devices, thin-film sensors, solar cells, optical coatings, x-ray optics, flat-panel displays, and more.
Interesting Application note 1 here. Interesting Application note 2 here.

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