Real-time integrated metrology platform for MOCVD and MBE.
The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. By integrating various measurement modules into a single optics head.
kSA ICE metrology system can measure real-time:
Key features
Reflectivity
Growth Rate
Film Thickness
Temperature
Wafer Curvature
Film Stress
It combines kSA MOS, and kSA RateRat Pro patented technologies, along with an Emissivity Corrected Pyrometry (ICE-ECPR) module. The ICE modular design allows the user to select the modules based on what they want to measure with their ICE system. When ordering, some users keep other modules in mind for future expansion.
The ICE tool can handle wafer-resolved measurement for rotation speeds up to 1,500 RPM. One of the many advantages is that it fits in tight spaces and measures multiple thin-film parameters in one device.
Keep cool while gaining insight into your MOCVD or MBE process, maximising device performance, and limiting process variation to increase yields with kSA ICE!
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