kSA MOS UltraScan/ThermalScan

The kSA MOS UltraScan and kSA MOS ThermalScan systems are flexible, high-resolution scanning wafer curvature, bow, and tilt-measurement systems.

Key features

  • Thin Film Curvature and Stress
  • Absolute Reflectance
  • Wafer Bow, Tilt and Warp
  • Spectral Reflectance and Film Thickness Options
  • Full Wafer Maps
Based on proven and patented kSA MOS technology, the kSA MOS UltraScan uses a laser array to map the two-dimensional curvature, wafer bow, and stress of semiconductor wafers, optical mirrors, glass, lenses – practically any polished surface. For room temperature measurements, explore the kSA MOS UltraScan. MOS ThermalScan: Full Temperature-Dependent Mapping of Curvature, Film Stress, Tilt, and Bow Height.
If you would like to know how your wafer changes with temperature, explore the kSA MOS ThermalScan. MOS UltraScan: Flexible, High-Resolution Curvature, Stress, Thickness, and Reflectance Mapping, All in One Tool! Download ThermalScan here.
Related Application Notes: Note 1 here. Note 2 here.
Watch interesting videos: Control Your Stress with kSA MOS Technology. kSA MOS UltraScan Full Sample Mapping of Curvature, Stress, Tilt, and Bow Height.

Download brochure