The kSA SpectR is a complete metrology solution for measurement of absolute spectral reflectance, growth rate and end point detection.
Key features
Spectral Reflectance
Growth Rate
Film Thickness
Process Control
The k-Space SpectR metrology tool provides absolute spectral reflectance measurements for in-line and in situ deposition applications such as Sputtering, MBE and MOCVD applications. This non-contact, non-invasive, real-time, wafer and film reflectance monitor is used for process monitoring and process control for semi-transparent thin-films.Custom spectral features such as reflectance minima, maxima, inflection points, or baseline scatter level, over a user defined wavelength range of interest, are easily measured. When monitored as a function of time during deposition, the film growth rate can also be determined.Applications
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