MANTIS Deposition MATS Compatible Spares
Original subcontractor parts, fully compatible with MANTIS Deposition MATS RF Atom sources to keep your source running.
Key features
- Original subcontractor part
- Suitable for Oxides & Nitrides
- MATS30 & MATS60
Original subcontractor parts, fully compatible with MANTIS Deposition MATS RF Atom sources to keep your source running.